The French company CAMECA (Compagnie des Applications Mécaniques et Electroniques au Cinéma37 et à l’Atomistique) was at the forefront of development of the commercial electron microprobe through its collaboration with Raymond Castaing, a pioneer of the technology. After more than a decade of developing ion microscopes with Castaing and his student Georges Slodzian (e.g., Castaing and Slodzian, 1962), CAMECA released the ims3f, a triple (thus the 3 in 3f) focusing secondary ion mass spectrometer (SIMS), in 1978 (de Chambost, 2011). The relatively small magnet was limited to a mass resolving power with wide...
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